Application of MEMS Sensors in Aerospace Equipment

Single Axis MEMS Accelerometer

MEMS sensors are used in the aerospace field and require adaptation to different space environments, including: vacuum, electromagnetic radiation, high-energy particle radiation, plasma, micrometeoroids, planetary atmosphere, magnetic and gravitational fields, etc., as well as the operation of certain systems in spacecraft. The induced environment generated by time or under the action of space environment, for example, the vibration and impact environment caused by orbital control thruster ignition and solar battery wing extension; the induced magnetic field generated by the movement of magnetic materials and current loops on the spacecraft in the space magnetic field; Molecular pollution caused by the deposition of organic materials on other parts of the spacecraft.

MEMS Sensors in Aerospace Equipment

Therefore, aerospace sensors are mainly divided into status sensors and environmental sensors. The former includes real-time position sensors of various moving parts, such as flaps, aileron positions, nozzle size, throttle position, air brake position, landing gear retractable position, etc. , Aircraft status sensors, such as angle of attack, sideslip angle sensors, aircraft attitude sensors, etc., various parameters such as hydraulic pressure, oil pressure, engine vibration, lubricating oil metal chips, various consumables such as remaining fuel, consumption speed, etc., There are also icing sensors, fire alarm sensors, limit sensors, overload sensors, life sensors, and automatic conversion sensors for various redundancy systems.


Environmental sensors mainly include temperature sensors, humidity sensors, oxygen sensors, pressure sensors, and flow sensors.

There are five main uses of MEMS sensors in the aerospace field:

①Provide working information about the spacecraft and play a role in fault diagnosis;

②Judging the coordination of work among the sub-systems and verifying the design plan;

③Provide the information required for the system-wide self-inspection, and provide the basis for the commander’s decision-making;

④Provide the internal test parameters of each sub-system and the whole machine to verify the correctness of the design.

⑤Monitor the internal and external environment of the aircraft, provide the necessary living conditions for the pilots and astronauts, and guarantee the normal flight parameters.

Electronic equipment composed of MEMS sensors

MEMS sensors have important applications in aircraft electronic equipment, aircraft design, and micro-satellite technologies. Airborne distributed air data computer, multi-function miniature air data probe (or combined airspeed tube), miniature pressure sensor (static pressure, differential pressure and dynamic pressure), which is composed of total pressure, static pressure and angle of attack. The signal processing unit is directly composed and encapsulated in the housing to form a micro-electromechanical system.

MEMS inertial navigation system

The micro inertial navigation system integrates a micro gyroscope, a micro accelerometer and its signal processing unit. The system is mainly made of silicon material and is manufactured with MEMS processing technology. Its volume and mass are at least 2 to 3 lower than the conventional inertial navigation system Magnitude.

The miniature inertial measurement unit (MIMU) manufactured with MEMS technology has no rotating parts and is much better than conventional inertial instruments in terms of life, reliability, cost, volume and quality. The standardized, high-performance spacecraft attitude measurement instruments produced are better in performance, cheaper in price, and can be used on aerospace platforms. The use of ERICCO MIMU devices can greatly reduce the weight of the device, its low price, small size, and light weight make MEMS inertial navigation systems play an important role in aerospace equipment, like High Performance MEMS IMU ER-IMU-M02.

MEMS acceleration sensor

MEMS acceleration sensor

Acceleration sensors are used in aerospace applications in attitude and heading reference systems; strapdown inertial measurement units; aircraft navigation systems; flight control systems; structural testing during flight including flutter testing; health system testing; stability testing; ground vibration testing (Wind tunnel test); modal test; engine control system, guidance system, etc. ERICCO’s MEMS Accelerometer ER-MA-5 mainly used in flight control and navigation system, which can measure the linear acceleration due to gravity. MEMS accelerometer has the advantages of small volume, light weight and low energy consumption.

Aerospace sensors are widely used in flight, flight test, engine test, structural strength test, wind tunnel test, and in the manufacturing process of equipment. The characteristics of pressure measurement are: There are many types of pressures to be measured, a wide range of pressures, many pressure measuring points, and high measurement accuracy is required.

The aerospace industry integrates contemporary advanced manufacturing technology, information technology and material technology. The requirements for sensors are getting higher and higher. The development direction of MEMS sensors is multi-function, miniaturization, intelligence, and integration. With the further improvement of product reliability. With the reduction of prices and the continuous maturity and improvement of manufacturing technology, the application of MEMS sensors in the aerospace field will replace traditional sensors in a wider range.

For more MEMS sensor functions and application introduction, please visit

MEMS Inertial measurement unit

Inertial navigation system

MEMS Inertial navigation system

inertial survey system

integrated navigation system

Attitude Heading Reference System (AHRS)

gyro theodolite

digital compass

electronic compass

tilt sensor

inclination sensor

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High Accuracy MEMS Accelerometer
High Accuracy MEMS Accelerometer
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High Precision Navigation MEMS Gyroscope
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Smallest Size Triaxial MEMS North Seeker
Cost-Efficient Triaxial MEMS North Seeker
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High Performance Navigation MEMS IMU
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