High Accuracy MEMS Accelerometer

ER-MA-5 (Alternative of MS1000):
1. Bias stability (Allan Curve) 5 μg;
2. Bias stability (1s Standard Deviation)(1σ)<20μg;
3. Bias month repeatability 200μg.

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Introduction

ER-MA-5 High Accuracy MEMS Accelerometer (Alternative of MS1000)

Accelerometer is an inertial sensor, which can measure the linear acceleration due to gravity. MEMS accelerometer has the characteristics of small volume, light weight and low energy consumption that can be widely used in vibration detection, attitude control, security alarm, consumer applications, motion recognition and status recording. Accelerometers are combined with gyroscopes and magnetometers to create IMU (inertial measurement units).

Applications

Inertial measurement: inertial guidance, overload measurement, combined navigation
Tilt measurement: antenna attitude, platform measurement, dip test
Vibration measurement: mechanical equipment, bridge dam, safety test

Specifications

Axis	X	X	X	X	Unit
Range	2-10	30-50	70-100	150-200	g
Bandwidth	100	100	100	100	Hz
Bias Stability (Allan Curve)	<5	<10	<20	<30	μg
Bias Stability (1s Standard Deviation) (1σ)	<20	<50	<100	<150	μg
Bias Month Repeatability	100-300	300-500	1000	1000	μg
Bias Temp Coefficient	<10	<50	<100	<200	μg/℃
Bias Temp Hysteresis	<0.5	<1	<3	<5	mg
Factor Scale Non-linearity	<500	<1000(2000@50g)	<1000	<2000(3000@50g)	ppm
Scale Factor Month Repeatability	<300	<300	<300	<300	ppm
Scale Factor Temp Coefficient	10	10	10	10	ppm/℃
Class II Non-linearity Coefficient	<100	<100	<100	<100	μg/g2
Scale Factor	4000000-800000	200000-150000	100000-80000	50000-40000	Lsb/g
Resolution	5	10	25	50	μg
Start Time	<1	<1	<1	<1	s
Sampling Rate	1500	1500	1500	1500	Hz
Shock(charged)	10000	10000	10000	10000	g
Shock(uncharged)	10000	10000	10000	10000	g
Vibration Rectification Error (6grms)	/	<0.4	<0.15	<0.05	mg/grms
Operation Temp	-40~+80				℃
Voltage	5±0.25	5±0.25	5±0.25	5±0.25	V
Current	<15	<15	<15	<15	mA
Interface	SPI	SPI	SPI	SPI	SPI