How MEMS Micro Accelerometers Work

The working principle of the accelerometer can be summarized as follows: When the accelerometer accelerates with the external object (the acceleration of the object is the acceleration to be measured), the mass is moved by the inertial force in the opposite direction. The displacement of the mass is limited by the spring and damper. Obviously, the displacement has a one-to-one correspondence with the external acceleration: when the external acceleration is fixed, the mass has a certain displacement; when the external acceleration changes (as long as the change is not fast), the displacement of the mass also changes accordingly. On the other hand, when the mass is displaced, the capacitance between the movable arm and the fixed arm (ie, the inductor) changes accordingly; if the change in the output voltage of the sensor is measured, it is equivalent to the measured execution. Displacement of the mass (mass). Since the displacement of the actuator has a certain one-to-one correspondence with the acceleration to be measured, the output voltage has a certain relationship with the external acceleration, that is, the external acceleration can be measured by the output voltage.

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