MEMS accelerometers can be divided into three forms according to the maturity of technology: piezoelectric, capacitive, and thermal. The piezoelectric MEMS…
The accelerometer is composed of detection mass (also called sensitive mass), support, potentiometer, spring, damper and housing. Constrained by the support…
The important parameters of MEMS gyroscope include: resolution, zero angular velocity output (zero output), sensitivity and measurement range. These parameters are…