Capacitive Micro Accelerometer

Capacitive micro accelerometers are the most common and mature products. The basic principle is to use the capacitor as a detection interface to detect the micro-displacement of the inertial mass due to the inertial force. The mass is supported by the elastic microbeam support on the substrate. One plate of the detection capacitor is generally disposed on the moving mass, and one plate is disposed on the fixed substrate. Figure 2 shows a typical sandwich-type flat capacitive micro accelerometer. Also, the capacitive micro accelerometer developed by AD uses a comb-tooth array capacitor as a detection interface. The capacitive micro accelerometer has high sensitivity and measurement accuracy, good stability, small temperature drift, low power consumption, and strong overload protection capability. It can realize feedback closed-loop control by using electrostatic force, which significantly improves the performance of the sensor.

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