Three-Axis MEMS Accelerometer

ER-3MA-09
1.High stability 3-axis MEMS accelerometer
2.40g range
3.Integrated temperature sensor

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Introduction

Introduction

The ER-3MA-09 is a 3-axis MEMS accelerometer with digital output capability. Featuring low noise, minimal temperature drift, and excellent long-term stability, it is ideal for high- precision measurement systems. The device is housed in a ceramic package, ensuring reliable performance over extended periods.

Features

1.High stability 3-axis MEMS accelerometer
2.40g range
3.Integrated temperature sensor
4.Digital output interface
5.Operating voltage: 3.0V to 3.6V
6.Ceramic encapsulation (6 x 6 x 2.2 mm)
7.Operating temperature range: -45 to +85°C

Specifications

Specification	Parameter	Unit
Product model	ER-3MA-09
Encapsulation	CLCC14
Axis	X, Y, Z
Range	40	g
Factor Scale Non-linearity	<1000(X,Y), <5000(Z)	ppm（IEEE Norm , of full scale）
Bandwidth (adjustable) 3db	≥200	Hz
Group delay	<1.5	ms
Bias before leaving the factory (at room temperature)	±1mg（X，Y），±1.5mg（Z）	mg (room temperature calibration value)
Bias temperature drift before leaving the factory	<5	mg
Bias temperature hysteresis before leaving the factory	<1.5	mg
Bias Stability (1s smooth)	100ug（X，Y）, 150ug（Z）	ug
Bias Stability (10s smooth)	75ug（X，Y），100ug（Z）	ug
Bias instability (Allan Curve)	20ug（X，Y）,25ug（Z）	ug
On-off repeatability 1σ	<50ug（X，Y），<75ug（Z）	ug
Scale Factor set in factory	12800±13	lsb/g (Room temperature calibration value)
Scale Temp Coefficient	100	ppm/°C
Scale factor after compensation	100	ppm (second-order compensation) 1 sigma
Start time	<200	ms
ODR (adjustable)	4K	Hz
Shock (charged)	3000	g
Shock (uncharged)	3000	g
Vibration rectification error (6 grms)	1（X，Y）3（Z）	mg/grms
Operate Temp	-45~+85	°C
Supply Voltage	3.3±10%	V
Current	<600	uA
Interface	SPI