High Performance MEMS Gyroscope

High Performance MEMS Gyroscope

ER-MG-067 (<0.3°/hr)
1. <0.3°/hr bias instability;
2. <0.125°/√hr angular random walk;
3. 3°/hr bias stability.

High Performance MEMS Gyroscope

High Performance MEMS Gyroscope

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    ER-MG-067 High Performance MEMS Gyro 

    The ER-MG-067, a high performance MEMS Gyro with 0.3 deg/hr bias of instability and 0.125°/√h of angular random walk, is a single-axis MEMS angular rate sensor (gyroscope) capable of measuring angular velocity up to a maximum of ±400°/s with digital output compliant to SPI slave mode 3 protocol. Angular rate data is presented as a 24-bit word.
    The ER-MG-067 is intended for industrial, instrumentation, stabilization, and other high performance applications. An advanced, differential sensor design rejects the influence of linear acceleration, enabling ER-MG-067 to operate in exceedingly harsh environments where shock and vibration are present.
    The ER-MG-067 is available in a hermetically sealed ceramic LCC surface mount package, and is capable of operating at 5V supply and a wide temperature range (−40°C to +85°C).

    Proven and robust silicon MEMS gyro
    Up to ±400°/s measurement range
    0.3°/hr bias instability
    0.125°/√hr angular random walk
    Digital output (SPI slave)
    5V operation (4.75~5.25V supply)
    Low power consumption (35 mA)
    High shock and vibration rejection
    Hermetically sealed ceramic LCC surface mount package (11x11x2mm)
    Integrated temperature sensor
    RoHS compliant

    Azimuth, attitude, position measuring and keeping in GNSS-assisted INS
    Heading, pitch, roll measuring in AHRS for UAV
    Motion survey and keeping in MRU
    Attitude & azimuth keeping, positioning in IMU
    Guidance, navigation, control in tactical MEMS weapon system
    Stabilizing & Pointing in satellite antenna,target tracking system
    Robotic Control & Orientation in Autonomous machines, Unmanned vehicles


    Parameters ER-MG-067 Unit
    Range 400 deg/s
    Resolution 24 bits
    Data rate 12K Hz
    Group delay <1.5 ms
    Bandwidth (-3dB) 250 Hz
    Scale factor at 25°C 16000 lsb/deg/s
    Scale factor repeatability (1σ) <50 ppm
    Scale factor VS temperature (1σ) 300 ppm
    Scale factor non-linearity (1σ) <300 ppm
    Bias instability <0.3 deg/hr
    Bias stability (1σ 10s) <3 deg/hr
    Bias stability (1σ 1s) <9 deg/hr
    Bias repeatability (1σ) <1 deg/hr
    Angular random walk <0.125 °/√h
    Bias error over temperature (1σ) 50 deg/hr
    Bias temperature variations, calibrated (1σ) <10 deg/hr
    Noise peak to peak ±0.2 deg/s
    G-sensitivity <1 °/hr/g
    Vibration rectification error <1 °/hr/g (rms)
    Startup time 1 s
    Sensor resonant frequency 11K~13K
    Environment, power and physical
    Shock (operating) 500g, 1ms, half sine wave
    Shock (survival) 10000g, 1.0ms, half sine wave
    Vibration (operating) 12grms, 20Hz to 2KHz random vibration
    Operating temperature -40°C~+85°C
    Max storage (survival) temperature -55°C~+125°C
    Supply voltage 5±0.25V
    Current consumption 40mA

    Application Techniques

    1.Integrated method of three-axis MEMS gyroscope
    2.Comparative analysis of integrated modes of three-axis MEMS gyroscope
    3.MEMS Gyroscope: Error Compensation By Allan Variance Method
    4.Basic Knowledge of Bias Stability of MEMS Gyroscope
    5.Bandwidth test method of MEMS gyroscope
    6.MEMS Gyroscope: Sensitive Structure | Detection Circuit | Integrated Package

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