High Performance MEMS Gyroscope

ER-MG-067 (<0.3°/hr)
1. <0.3°/hr bias instability;
2. <0.125°/√hr angular random walk;
3. 3°/hr bias stability.

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Introduction

ER-MG-067 High Performance MEMS Gyro

Introduction
The ER-MG-067, a high performance MEMS Gyro with 0.3 deg/hr bias of instability and 0.125°/√h of angular random walk, is a single-axis MEMS angular rate sensor (gyroscope) capable of measuring angular velocity up to a maximum of ±400°/s with digital output compliant to SPI slave mode 3 protocol. Angular rate data is presented as a 24-bit word.
The ER-MG-067 is intended for industrial, instrumentation, stabilization, and other high performance applications. An advanced, differential sensor design rejects the influence of linear acceleration, enabling ER-MG-067 to operate in exceedingly harsh environments where shock and vibration are present.
The ER-MG-067 is available in a hermetically sealed ceramic LCC surface mount package, and is capable of operating at 5V supply and a wide temperature range (−40°C to +85°C).

Features
Proven and robust silicon MEMS gyro
Up to ±400°/s measurement range
0.3°/hr bias instability
0.125°/√hr angular random walk
Digital output (SPI slave)
5V operation (4.75~5.25V supply)
Low power consumption (35 mA)
High shock and vibration rejection
Hermetically sealed ceramic LCC surface mount package (11x11x2mm)
Integrated temperature sensor
RoHS compliant

Applications
Azimuth, attitude, position measuring and keeping in GNSS-assisted INS
Heading, pitch, roll measuring in AHRS for UAV
Motion survey and keeping in MRU
Attitude & azimuth keeping, positioning in IMU
Guidance, navigation, control in tactical MEMS weapon system
Stabilizing & Pointing in satellite antenna,target tracking system
Robotic Control & Orientation in Autonomous machines, Unmanned vehicles

Specifications

Parameters	ER-MG-067	Unit
Range	400	deg/s
Resolution	24	bits
Data rate	12K	Hz
Group delay	<1.5	ms
Bandwidth (-3dB)	250	Hz
Scale factor at 25°C	16000	lsb/deg/s
Scale factor repeatability (1σ)	<50	ppm
Scale factor VS temperature (1σ)	300	ppm
Scale factor non-linearity (1σ)	<300	ppm
Bias instability	<0.3	deg/hr
Bias stability (1σ 10s)	<3	deg/hr
Bias stability (1σ 1s)	<9	deg/hr
Bias repeatability (1σ)	<1	deg/hr
Angular random walk	<0.125	°/√h
Bias error over temperature (1σ)	50	deg/hr
Bias temperature variations, calibrated (1σ)	<10	deg/hr
Noise peak to peak	±0.2	deg/s
G-sensitivity	<1	°/hr/g
Vibration rectification error	<1	°/hr/g (rms)
Startup time	1	s
Sensor resonant frequency	11K~13K
Environment, power and physical
Shock (operating)	500g, 1ms, half sine wave
Shock (survival)	10000g, 1.0ms, half sine wave
Vibration (operating)	12grms, 20Hz to 2KHz random vibration
Operating temperature	-40°C~+85°C
Max storage (survival) temperature	-55°C~+125°C
Supply voltage	5±0.25V
Current consumption	40mA