MEMS sensor, or Microelectro Mechanical Systems, is a multidisciplinary frontier research field developed on the basis of microelectronics technology. After more than 40 years of development, it has become one of the major scientific and technological fields that have attracted worldwide attention. It involves electronics, machinery, materials, physics, chemistry, biology, medicine and other disciplines and technologies, and has broad application prospects. As of 2010, there are about 600 units around the world engaged in the development and production of MEMS, and hundreds of products have been developed, including micro pressure sensors, acceleration sensors, micro inkjet print heads, and digital micro mirror displays. Among them, MEMS sensors account for a considerable proportion. MEMS sensor is a new type of sensor manufactured using microelectronics and micromachining technology. Compared with traditional sensors, it has the characteristics of small size, light weight, low cost, low power consumption, high reliability, suitable for mass production, easy integration and realization of intelligence. At the same time, the feature size on the order of micrometers allows it to perform functions that some traditional mechanical sensors cannot.
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