1. Research background and status quo 1.1 Research background With the rapid development of transportation worldwide, reliable and accurate vehicle positioning…
MEMS (Micro-Electro-Mechanical System) refers to a complete micro electromechanical system that integrates mechanical elements, micro sensors, signal processing and control circuits,…
Compared with traditional sensors, MEMS sensors, namely Microelectro Mechanical Systems, have the characteristics of small size, light weight, low cost, low…