Research on scale factor nonlinearity of MEMS gyroscope

Scale factor is an important index of MEMS gyroscope, which means that in the range of MEMS gyroscope┬áinput angular velocity, the output of the gyroscope relative to the maximum deviation of the least square fitting line and the maximum output in the range of the MEMS gyroscope. This paper will analyze the nonlinear degree of … Continue reading Research on scale factor nonlinearity of MEMS gyroscope