How does a MEMS gyroscope work?

The internal principle of the MEMS gyroscope is as follows: apply voltage to the fixed finger and alternately change the voltage, let a mass move back and forth in an oscillating manner. When rotating, the Coriolis acceleration will be generated, and then it can be measured. This is a bit like an accelerometer, and the decoding method is roughly the same, and the amplifier is used. The angular rate is determined by the Coriolis acceleration measurement

– Coriolis acceleration = 2 × (w × mass speed)

– w is the angular rate applied (w = 2 πf)

Fast coupling to the accelerometer frame through the speed (periodic motion) applied by the 14 kHz resonant structure

– Coriolis acceleration has the same frequency and phase as the resonator, so it can cancel low-speed external vibration

The mechanical system is similar in structure to accelerometers (micromachined polysilicon)

Signal conditioning (voltage conversion offset) uses techniques similar to accelerometers

A varying voltage is applied to move the device back and forth, at which point the device has only horizontal motion and no vertical motion. If a rotation is applied, it can be seen that the device will move up and down, and the external finger will sense the motion so that the rotation-related signal can be picked up.

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