MEMS Gyroscope: Sensitive Structure | Detection Circuit | Integrated Package

  MEMS gyroscope┬áis a kind of MEMS inertial sensor which uses Coriolis effect to detect the rotational angular rate of objects. It can integrate the sensitive structure and peripheral measurement and control circuit on the same silicon chip, and has the advantages of low cost, small size, light weight and low power consumption. The sensitive … Continue reading MEMS Gyroscope: Sensitive Structure | Detection Circuit | Integrated Package