Evolution of resonant structure of high precision MEMS gyroscope

MEMS gyroscope┬áis widely used in various fields because of its advantages of low power consumption, light weight and low cost. High-precision MEMS gyro can improve the attitude measurement and control accuracy of many types of equipment and platforms, and is expected to solve the autonomous navigation problem of unmanned vehicles, drones and other equipment in … Continue reading Evolution of resonant structure of high precision MEMS gyroscope