Development history of MEMS gyroscope

MEMS gyroscope┬áis a kind of solid wave gyro, which is usually processed by micro and nano manufacturing technology, and has the characteristics of small volume, high performance, low power consumption and mass. Since the birth of the world's first hemispherical resonator gyro in 1975, the harmonic oscillator topology of MEMS gyro has undergone the evolution … Continue reading Development history of MEMS gyroscope